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Proceedings Paper

Radial shearing interferometer for aspheric surface testing
Author(s): Ming Wang; Bin Zhang; Shouping Nie; Jiwu Fu
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Paper Abstract

In this paper, aspheric surface testing technique with radial shearing interferometer has been developed. Zone plates are proposed to construct radial shearing interferometer because of its stability and simplicity. Zone plates were designed and fabricated by photographic processing, which is used as radial shearing devices. Radial shearing interferogram are detected by a CCD camera and processed by a PC computer. Fringe phase of shearing interferogram is evaluated by Fast Fourier transform (FFT) algorithm. Wave aberration estimation method of aspheric surface is also presented, which is depended on polynomial expansion fitting. Some errors of interferometer are discussed. Finally, theoretical analysis and experimental results are compared, which shows its accuracy is less than λ/20.

Paper Details

Date Published: 20 September 2002
PDF: 4 pages
Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.471690
Show Author Affiliations
Ming Wang, Nanjing Normal Univ. (China)
Bin Zhang, Nanchang University (China)
Shouping Nie, Nanjing Normal Univ. (China)
Jiwu Fu, Nanchang University (China)

Published in SPIE Proceedings Vol. 4927:
Optical Design and Testing
Zhicheng Weng; Jose M. Sasian; Yongtian Wang, Editor(s)

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