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Proceedings Paper

New long trace profiler for aspheric optical surface metrology
Author(s): Tiqiao Xiao; Shaojian Xia
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Paper Abstract

A long trace profiler (LTP) is specially designed for the metrology of long aspheric optical surfaces and has been widely used in the fields of synchrotron radiation and astronomy. An LTP with an innovative design has been successfully developed at SSRF. An f-θ system based on phase plate diffraction collimation is employed for the first time. Effect of source instability and ambient factors on the precision is greatly reduced, compared to other LTPs now available. The scanning range is 350mm, precision better than 0.5μrad, static repeatability 0.1μrad. The profiler has been calibrated by a standard mirror from Chinese National Institute of Metrology.

Paper Details

Date Published: 20 September 2002
PDF: 6 pages
Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.471438
Show Author Affiliations
Tiqiao Xiao, Shanghai Institute of Nuclear Research (China)
Shaojian Xia, Shanghai Institute of Nuclear Research (China)

Published in SPIE Proceedings Vol. 4927:
Optical Design and Testing
Zhicheng Weng; Jose M. Sasian; Yongtian Wang, Editor(s)

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