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Proceedings Paper

Pulsed laser ablation of IC packages for device failure analyses
Author(s): Ming Hui Hong; ZhiHong Mai; G. X. Chen; Thomas Thiam; Wen Dong Song; Yongfeng Lu; Chye Eng Soh; Tow Chong Chong
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Paper Abstract

Pulsed laser ablation of mold compounds for IC packaging in air and with steam assistance is investigated. It is applied to decap IC packages and expose computer CPU dies for the device failure analyses. Compared with chemical decapping, the laser ablation has advantages of being fast speed, non- contact and dry processing. Laser ablation with the steam assistance results in higher ablation rate and wider ablated crater with much smoother surface morphology. It implies that the steam assisted laser ablation can achieve a faster and better quality laser processing. Audible acoustic wave and plasma optical signal diagnostics are also carried out to have a better understanding of the mechanisms behind. Light wavelength and laser fluence applied in the decapping are two important parameters. The 532 nm Nd:YAG laser decapping at a low laser fluence can achieve a large decapping area with a fine ablation profile. IC packages decapped by the laser ablation show good quality for the device failure analyses.

Paper Details

Date Published: 18 June 2002
PDF: 8 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470669
Show Author Affiliations
Ming Hui Hong, Data Storage Institute (Singapore)
ZhiHong Mai, Advanced Micro Devices Pte Ltd. (Singapore)
G. X. Chen, Data Storage Institute (Singapore)
Thomas Thiam, Advanced Micro Devices Pte Ltd. (Singapore)
Wen Dong Song, Data Storage Institute (Singapore)
Yongfeng Lu, Data Storage Institute (United States)
Chye Eng Soh, Advanced Micro Devices Pte Ltd. (Singapore)
Tow Chong Chong, Data Storage Institute (Singapore)

Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Koji Sugioka; Malcolm C. Gower; Willem Hoving; Richard F. Haglund Jr.; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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