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Proceedings Paper

Plasma behavior during high-brightness (DPSS) laser-materials interaction
Author(s): Jyotirmoy Mazumder; Mark Douglass; Peng Li
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Paper Abstract

Diode pumped Nd:YAG lasers are becoming a potentially powerful tool for microelectronics packaging and micro- machining. One of the major advantages of such lasers is high brightness and pulse formatting capability. This offers a tool for controlled materials removal or micro-welding. The recently developed high power diode pumped Nd-YAG laser with Slab geometry opened the door for even higher power density. On the other hand, high brightness poses a challenge for management of laser-induced plasma for process stability and repeatability. In order to develop the fundamental understanding of the role of plasma during the laser micro-machining, one needs to fully characterize the plasma density. Laser absorption spectroscopy is a good tool for that purpose since it measures the events near the ground level where population is high and thus measurements are more accurate. This paper describes the technique and presents the results.

Paper Details

Date Published: 18 June 2002
PDF: 9 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470655
Show Author Affiliations
Jyotirmoy Mazumder, Univ. of Michigan (United States)
Mark Douglass, Univ. of Michigan (United States)
Peng Li, Univ. of Michigan (United States)

Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Koji Sugioka; Malcolm C. Gower; Willem Hoving; Richard F. Haglund Jr.; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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