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Proceedings Paper

Production of innovative geometries with UV lasers
Author(s): Andreas Ostendorf; Christian Kulik; Uwe Stute
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Paper Abstract

Excimer lasers are proven tools to machine 2½-D microstructures with variable lateral dimensions. Therefore developed techniques are limited in the vertical dimension since material is removed along the optical axis perpendicular to the target plane. This paper presents 3D structures produced with such UV-lasers. In contrast to optical set-ups for machining 2½-D structures, this approach tilts the target plane and ablates material underneath the target superficies. The tilting angle adds two major difficulties to laser machining: the distortion of the image on the target and the alteration of the ablation cross section. These two difficulties were studied in experiments with different tilting angles β L between target plane and optical axis of the laser. The impact of β L was identified on the achieved geometry of 3D structures. A first theoretical approximation integrates the material reflectance and the target cross-section in order to give an estimation of the influence of further effects within the ablation process. This theoretical analysis is a starting point for producing undercutting structures and can additionally be applied to changeable shaped surfaces. Such compel 3D structures have the potential to be sued in micro- tribology as well as in micro guidance systems and are estimated being an important step in micro-mechanics.

Paper Details

Date Published: 18 June 2002
PDF: 11 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470634
Show Author Affiliations
Andreas Ostendorf, Laser Zentrum Hannover e.V. (Germany)
Christian Kulik, Laser Zentrum Hannover e.V. (Germany)
Uwe Stute, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Koji Sugioka; Malcolm C. Gower; Willem Hoving; Richard F. Haglund Jr.; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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