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Proceedings Paper

F2-laser microfabrication of buried waveguide structures in transparent glasses
Author(s): Xiaoli Midori Wei; Kevin P. Chen; Dragan Coric; Peter R. Herman; Jianzhao Li
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Paper Abstract

Buried optical waveguides have been fabricated directly in pure bulk fused silica with a novel high-resolution 157-nm optical processing system. Refractive index changes of > 10-4 were induced within the small focal volume of large numerical-aperture optics, removing the need for ultrafast laser interactions. Single-mode guiding was inferred from Gaussian-like near-field and far-field intensity distributions of 635-nm guided light. The results demonstrate a useful extension of writing buried 3D refractive index structures inside glasses with nanosecond duration UV lasers.

Paper Details

Date Published: 18 June 2002
PDF: 7 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470629
Show Author Affiliations
Xiaoli Midori Wei, Univ. of Toronto (Canada)
Kevin P. Chen, Univ. of Toronto (Canada)
Dragan Coric, Univ. of Toronto (Canada)
Peter R. Herman, Univ. of Toronto (Canada)
Jianzhao Li, Univ. of Toronto (Canada)

Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Koji Sugioka; Malcolm C. Gower; Willem Hoving; Richard F. Haglund Jr.; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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