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Proceedings Paper

High-resolution F2-laser machining of micro-optic components
Author(s): Jianzhao Li; Peter R. Herman; Xiaoli Midori Wei; Kevin P. Chen; Juergen Ihlemann; Gerd Marowsky; Peter Oesterlin; Berthold Burghardt
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Paper Abstract

The F2-laser Nano fabrication Facility at the University of Toronto delivers high-fluence 157-nm radiation at high resolution to micro fabricate high-finesse silica-based optical components. The 7.9-eV photons drive strong material interactions near the band-edge states of fused silica and related glasses that help avoid microcrack formation, a common limitation of longer wavelength laser. The strong interactions provide for small and smooth excisions, offering depth control on a scale of tens of nanometers. A 157-nm beam homogenization system and a 25x Schwarzschild lens provided a uniform on-target fluence of 9 J/cm2 in a 0.25 mm by 0.25 mm field. Larger work are was enabled by synchronously driving the projection mask and target motion stages. The 0.4 NA lens supported the formation of high- aspect channel walls and surface-relief features as small as approximately 500 nm. Both mask projection and direct writing technique were employed. The novel aspects of the optical beam delivery system are presented together with results on fabricating micro-channels, cutting optical fiber, fabricating surface relief grating and cylindrical lens. The results demonstrate broad application directions for fabricating telecommunication devices, general optical and photonic components, and biological devices.

Paper Details

Date Published: 18 June 2002
PDF: 7 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470627
Show Author Affiliations
Jianzhao Li, Univ. of Toronto (Canada)
Peter R. Herman, Univ. of Toronto (Canada)
Xiaoli Midori Wei, Univ. of Toronto (Canada)
Kevin P. Chen, Univ. of Toronto (Canada)
Juergen Ihlemann, Laser Lab. Goettingen e.V. (Germany)
Gerd Marowsky, Laser Lab. Goettingen e.V. (Germany)
Peter Oesterlin, MicroLas Lasersystem GmbH (Germany)
Berthold Burghardt, MicroLas Lasersystem GmbH (Germany)

Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Koji Sugioka; Malcolm C. Gower; Willem Hoving; Richard F. Haglund Jr.; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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