Recent trends in laser application systems such as optical information systems, optical network systems, and optical measurement systems have presented a need for small size, light weight, low cost, and mass productivity. Advantages of a micro grating device in laser beam application systems are high integration capability, design flexibility, and mass productivity. In this paper, recent investigations of the micro gating devices using electron-beam lithography are described, with emphasis on clarifying both their uses and fundamental optical characteristics.

Date Published: 1 September 1991
PDF: 13 pages
Proc. SPIE 1507, Holographic Optics III: Principles and Applications, (1 September 1991); doi: 10.1117/12.47030

Published in SPIE Proceedings Vol. 1507:
Holographic Optics III: Principles and Applications
G. Michael Morris, Editor(s)