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Proceedings Paper

Ultrasonic atomic force microscopy with real-time mapping of resonance frequency and Q factor
Author(s): Kazushi Yamanaka; Hiroshi Irihama; Toshihiro Tsuji; Keiichi Nakamoto
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Paper Abstract

Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.

Paper Details

Date Published: 7 June 2002
PDF: 8 pages
Proc. SPIE 4703, Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems, (7 June 2002); doi: 10.1117/12.469611
Show Author Affiliations
Kazushi Yamanaka, Tohoku Univ. (Japan)
Hiroshi Irihama, Tohoku Univ. (Japan)
Toshihiro Tsuji, Tohoku Univ. (Japan)
Keiichi Nakamoto, JEOL Ltd. (Japan)

Published in SPIE Proceedings Vol. 4703:
Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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