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Proceedings Paper

100-Hz KrF laser plasma x-ray source
Author(s): I. C. Edmond Turcu; Malcolm C. Gower; C. J. Reason; P. Huntington; M. Schulz; Alan G. Michette; Fred Bijkerk; Eric Louis; Gregory J. Tallents; Yas Al-Hadithi; Dimitri Batani
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Paper Abstract

The Rutherford Appleton Laboratory Repetitive Laser-Plasma X-ray Source has been scaled to repetition rates of up to 100 Hz. An average power of 40 mW/sr has been measured from mylar tape targets in the spectral region 0.28 < h(upsilon) < 0.53 keV (the `water window') with approximately 30% of the emission in the hydrogen-like carbon ion L(alpha) (h(upsilon) equals 368 eV) line. A scanning transmission x-ray microscope (STXM) was used for the first time with a laser-plasma source to generate test images. The source was also run with Cu and Fe targets to generate h(upsilon) approximately equals 1 keV x-rays in atmospheric pressure helium, yielding at 30 Hz an average power of approximately 9 mW/sr. Proximity x-ray microlithography images in 1.2 micrometers thick photoresist have accurately reproduced features of approximately 0.3 micrometers.

Paper Details

Date Published: 1 September 1991
PDF: 15 pages
Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46951
Show Author Affiliations
I. C. Edmond Turcu, Rutherford Appleton Lab. (United Kingdom)
Malcolm C. Gower, Rutherford Appleton Lab. (United Kingdom)
C. J. Reason, Rutherford Appleton Lab. (United Kingdom)
P. Huntington, Rutherford Appleton Lab. (United Kingdom)
M. Schulz, King's College London (United Kingdom)
Alan G. Michette, King's College London (United Kingdom)
Fred Bijkerk, FOM-Instituut voor Plasmafysica Rijnhuizen (Netherlands)
Eric Louis, FOM-Instituut voor Plasmafysica Rijnhuizen (Netherlands)
Gregory J. Tallents, Univ. of Essex (United Kingdom)
Yas Al-Hadithi, Univ. of Essex (United Kingdom)
Dimitri Batani, Univ. Statale Milano (Italy)

Published in SPIE Proceedings Vol. 1503:
Excimer Lasers and Applications III
Tommaso Letardi; Lucien Diego Laude, Editor(s)

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