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Proceedings Paper

Experimental investigation of the effect of the MPL (magnetic polishing liquid) on surface finishing
Author(s): Kunio Shimada; Yongbo Wu; Yat Choy Wong; Toyohisa Fujita; Toshio Miyazaki; Atsushi Shibayama
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Paper Abstract

We investigated the polishing effect of magnetic polishing liquid (MPL) made of abrasive particles and a newly developed magnetic responsive fluid, magnetic compound fluid (MCF) as intelligent or smart fluid. By applying steady and fluctuating magnetic fields, we investigated the polishing effects of the magnetic fields, varying the kinds of polishing material and the components of the MPL. In order to explain the cause of the experimental results, we investigated the apparent viscosity of the MCF and MPL, and used microscopic to investigate behavior of the particles in the MCF and MPL. We clarified the mechanisms governing the polishing effects through the use of a model based on the observation of the particles.

Paper Details

Date Published: 13 November 2002
PDF: 9 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.469422
Show Author Affiliations
Kunio Shimada, Akita Prefectural Univ. (Japan)
Yongbo Wu, Akita Prefectural Univ. (Japan)
Yat Choy Wong, Swinburne Univ. of Technology (Australia)
Toyohisa Fujita, Akita Univ. (Japan)
Toshio Miyazaki, Akita Univ. (Japan)
Atsushi Shibayama, Akita Univ. (Japan)

Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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