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Proceedings Paper

Design and fabrication of an analog ASIC interfacing a -resonant capacitive MEMS sensor in a high-temperature environment (200 degrees C)
Author(s): Olivier Robert; Olivier Gigan; Hua Chen; Gilles Amendola
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Paper Abstract

This paper is dedicated to an electronic oscillator designed to control a MEMS (Micro-Electro-Mechanical System) sensor based on a clamped-clamped silicon micro-beam resonator. Due to the high-temperature environment (200°C) and the MEMS specificities, a specific architecture (MRC transimpedance) was implemented in a standard CMOS technology to improve the robustness and to enable the compensation of drifts due to the technologies used for both the sensor and the ASIC. Particular attention is given to the transimpedance first stage of the oscillator. In this paper and after a brief description of the entire oscillator, experimental results are given to demonstrate the capability of the designed ASIC.

Paper Details

Date Published: 14 November 2002
PDF: 12 pages
Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.469399
Show Author Affiliations
Olivier Robert, Groupe ESIEE (France)
Olivier Gigan, TRONIC'S Microsystems (France)
Hua Chen, Groupe ESIEE (France)
Gilles Amendola, Groupe ESIEE (France)

Published in SPIE Proceedings Vol. 4935:
Smart Structures, Devices, and Systems
Erol C. Harvey; Derek Abbott; Vijay K. Varadan, Editor(s)

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