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Proceedings Paper

3D-confocal microscopy for surface analysis of microstructured materials
Author(s): Bernd Kagerer; Rainer Brodmann; Juergen Valentin; Jan Filzek; Uwe Popp
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Paper Abstract

The surface of technical materials is playing an ever more important part in modern production processes. However, standard roughness values, which are obtained from a profile, frequently no longer provide sufficient descriptions. What are desired are three-dimensional measurements of surfaces over a macroscopic range with a high degree of vertical and lateral resolution. This has become necessary to be able to describe both deterministic and non-deterministic structures in the same fashion. Due to increased requirements for data and the measuring speed demanded by industry, only optical systems are a possibility. Using the example of tribology, the capability of this technology is shown in this article on the basis of the commercial confocal 3D white light microscope, the NanoFocusTMμSurfTM. On the one hand, the technology and data preparation used are discussed, and on the other, a comparison is drawn with other standard optical measuring methods.

Paper Details

Date Published: 4 June 2002
PDF: 11 pages
Proc. SPIE 4773, Optical Scanning 2002, (4 June 2002); doi: 10.1117/12.469201
Show Author Affiliations
Bernd Kagerer, NanoFocus Messtechnik GmbH (Germany)
Rainer Brodmann, NanoFocus Messtechnik GmbH (Germany)
Juergen Valentin, NanoFocus Messtechnik GmbH (Germany)
Jan Filzek, Univ. of Darmstadt (Germany)
Uwe Popp, Friedrich-Alexander Univ. of Erlangen-Nuernberg (Germany)

Published in SPIE Proceedings Vol. 4773:
Optical Scanning 2002
Stephen F. Sagan; Gerald F. Marshall; Leo Beiser, Editor(s)

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