A finite-element method is employed to model layered Surface Acoustic Wave (SAW) two port delay lines, with a zinc oxide (ZnO) thin film guiding layer. The structure is based on x-cut, y-propagating LiNbO₃ substrate. Conditions that model the realistic electrical and mechanical boundary values are applied to the structure to analyze the electromechanical properties of the SAW device. Transient analyses are performed and the frequency responses are calculated using the FFT. Simulation results show good agreement with experimental results, indicating that a finite-element method is an appropriate approach for modeling layered SAW devices.

Date Published: 14 November 2002
PDF: 12 pages
Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.469080

Published in SPIE Proceedings Vol. 4935:
Smart Structures, Devices, and Systems
Erol C. Harvey; Derek Abbott; Vijay K. Varadan, Editor(s)