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Proceedings Paper

Femtosecond-laser-induced refractive index modifications for fabrication of three-dimensional integrated optical devices
Author(s): Matthias Will; Jonas Burghoff; Stefan Nolte; Andreas Tuennermann
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Paper Abstract

We present the fabrication of three-dimensional waveguide structures indide fused silica using the femtosecond laser direct-writing technique. The guiding properties of a produced 1x3 splitter are studied in detail. By appropriate choice of the processing parameters a multimode entrance port can be generated which allows to vary the splitting ratio by changing the input coupling. The processing requirements for such splitter devices will be discussed.

Paper Details

Date Published: 15 April 2003
PDF: 7 pages
Proc. SPIE 4941, Laser Micromachining for Optoelectronic Device Fabrication, (15 April 2003); doi: 10.1117/12.468496
Show Author Affiliations
Matthias Will, Friedrich-Schiller-Univ. Jena (Germany)
Jonas Burghoff, Friedrich-Schiller-Univ. Jena (Germany)
Stefan Nolte, Friedrich-Schiller-Univ. Jena (Germany)
Andreas Tuennermann, Friedrich-Schiller-Univ. Jena (Germany)

Published in SPIE Proceedings Vol. 4941:
Laser Micromachining for Optoelectronic Device Fabrication
Andreas Ostendorf, Editor(s)

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