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Proceedings Paper

Unique MEMS characterization solutions enabled by laser Doppler vibrometer measurements
Author(s): Kevin Speller; Howard Goldberg; Jeff Gannon; Eric M. Lawrence
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Paper Abstract

Micro-Electro-Mechanical Systems (MEMS) devices present many difficult characterization challenges. In an environment where dimensions are measured in microns and mechanical resonant frequencies are measured in kilohertz, conventional measurement and characterization techniques cannot be used. Laser Doppler Vibrometer (LDV) technology offers many unique advantages for MEMS characterization and troubleshooting. One of the key problems in characterizing and troubleshooting MEMS devices is the separation of electrical and mechanical effects. By definition, MEMS devices have integrated electrical and mechanical components to form electro-mechanical systems. When characterizing and troubleshooting these devices it is often difficult to determine whether an observed behavior is purely mechanical, purely electrical, or inherently electro-mechanical. Because LDV measurements are electrically inert and do not introduce mechanical artifacts, they are ideally suited for this application. Applied MEMS and Polytec PT have successfully developed LDV based measurement techniques that allow detailed characterization and rapid troubleshooting of MEMS devices. Three real-world examples of MEMS characterization using a LDV are presented including, an optical micro-mirror, a robust low-noise accelerometer and a hermetic ceramic sensor package.

Paper Details

Date Published: 22 May 2002
PDF: 8 pages
Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468197
Show Author Affiliations
Kevin Speller, Applied MEMS, Inc. (United States)
Howard Goldberg, Applied MEMS, Inc. (United States)
Jeff Gannon, Applied MEMS, Inc. (United States)
Eric M. Lawrence, Polytec PI, Inc. (United States)

Published in SPIE Proceedings Vol. 4827:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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