Share Email Print

Proceedings Paper

Scanning laser Doppler vibrometer for dynamic measurements on small- and microsystems
Author(s): Paolo Castellini; Barbara Marchetti; Enrico Primo Tomasini
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

In the present work the development of a customised vibrometer able to work on Microsystems is shown. The system is based on a commercial Laser Doppler vibrometer, in which the optical set-up, the mechanical arrangement and the processing software and hardware were modified and developed to measure vibrations of small object with a resolution in the micro scale. The main characteristics of this system is a very versatile platform, in which laser Doppler Vibrometry, two-axis stages micropositioner, digital signal processing and image acquisition and processing can work together in order to obtain the integration of vibration measurements with other experimental techniques. The system developed, which represents the first step in this project, has been applied to a typical test case in order to verify performances and limits. A discussion about main features and limits is presented.

Paper Details

Date Published: 22 May 2002
PDF: 7 pages
Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468137
Show Author Affiliations
Paolo Castellini, Univ. degli Studi di Ancona (Italy)
Barbara Marchetti, Univ. degli Studi di Ancona (Italy)
Enrico Primo Tomasini, Univ. degli Studi di Ancona (Italy)

Published in SPIE Proceedings Vol. 4827:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?