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Proceedings Paper

Digital image processor for complex shape metrology
Author(s): Qi-De Qian
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Paper Abstract

In this paper, we apply image-processing techniques to the task of metrology on complex shapes. We describe techniques for noise reduction, edge detection, and feature contour extraction on scanning electron microscope images. We present a novel capability for calculating the area of an arbitrary shape. We demonstrate imaged based metrology capabilities using examples encountered in photomask processing.

Paper Details

Date Published: 27 December 2002
PDF: 7 pages
Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); doi: 10.1117/12.467779
Show Author Affiliations
Qi-De Qian, IC Scope Co. (United States)

Published in SPIE Proceedings Vol. 4889:
22nd Annual BACUS Symposium on Photomask Technology
Brian J. Grenon; Kurt R. Kimmel, Editor(s)

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