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Proceedings Paper

In-situ optical probe interferometer for measuring displacement of nanoindenter: a configuration
Author(s): Zhi Li; Konrad Herrmann; Frank Pohlenz
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Paper Abstract

Instrumented indentation testing in the nano-range with 'nanoindentation instrument' is playing an increasing role in the characterization of the mechanical properties of thin layers used in surface technology, microelectronics, micromechanics, optics etc. Several works concerning calibration of nanoindentation instruments were published in the last years, and the calibration of the performance of the depth sensing system in a nanoindentation instrument is now under way. In this paper, an optical probe interferometer for calibrating the depth measuring system in a Hysitron Triboscope has been presented, the principle and configuration of the interferometer are detailed. Error sources in the interferometry and their contribution to the interferometer performance have been discussed, which proves that the newly developed calibration device possesses the capability of sensing displacement with subnanometric accuracy.

Paper Details

Date Published: 18 October 2002
PDF: 8 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467681
Show Author Affiliations
Zhi Li, Physikalisch-Technische Bundesanstalt (Germany)
Konrad Herrmann, Physikalisch-Technische Bundesanstalt (Germany)
Frank Pohlenz, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)

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