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Proceedings Paper

Optical tomography using confocal fan-beam illumination and its application to LCD panel inspection
Author(s): Akira Ishii; Makoto Shimizu; Yoshitaka Imoto
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Paper Abstract

This paper describes optical tomography using oblique and confocal fan-beam illumination devised for transparent-layered objects. This 3-D imaging method has the advantage of area-at-a-time sensing and it is free from disturbances caused by defects on the object surface, compared with the conventional confocal microscopy based on point-by-point sensing and co-axial illumination. The method was applied to LCD panel inspection and was successful in efficiently detecting foreign substances between the constituent layers in LCD. Furthermore, it was robust against scratches and dust on the protection film surface of the LCD.

Paper Details

Date Published: 18 October 2002
PDF: 7 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467626
Show Author Affiliations
Akira Ishii, Ritsumeikan Univ. (Japan)
Makoto Shimizu, ROHM Co., Ltd. (Japan)
Yoshitaka Imoto, Ritsumeikan Univ. (Japan)

Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)

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