This paper presents an investigation of a stand-alone PZN-PT film-based movable micro-mirror and characterizes its precision level. Micro-mirrors have received considerable attention for applications in various micro-opto-electro-mechanical systems (MOEMS). For example, there is considerable interest in creating micro-mirror arrays for image display and telecommunication applications. Such optical applications require high precision position control of micro-mirrors. We present the development of stand-alone self-moving micro-mirrors on the basis of a single-film actuation mechanism. The mirror design provides for tilt motion using a single-crystal Pb(Zn₁/3Nb_2/3)O₃-PbTiO₃ (PZN-PT) film unimorph actuator. A prototype micro-mirror plate is designed to a size of 600 × 400 × 10 μm³ including actuation device. In this paper, it is shown that a prototype micro-mirror fabricated in our laboratories can be operated at frequency of 50 kHz.

Date Published: 18 October 2002
PDF: 8 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467609

Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)