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Proceedings Paper

Vertical-scanning profilometry using double-exposure camera and two short-coherent light sources of different wavelengths
Author(s): Masaaki Adachi; Katsuyuki Inabe
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Paper Abstract

We propose a new vertical-scanning profilometry which has potentiality of realizing high-speed measurement. The proposed profilometry measures 3-D shape by use of phase-shifting techniques with a large phase shift 2n π + π/2. With such large shifts, 2 pai phase ambiguities normally suffer precision measurements of phases. Therefore, the profilometry was equipped with two short-coherent-light sources of different wavelengths and a double-exposure camera, and measures the phases of two different wavelengths at nearly the same optical path difference. From the phases and a vertical-scanning step height, 3-D profile is calculated with nanometer precision.

Paper Details

Date Published: 18 October 2002
PDF: 8 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467345
Show Author Affiliations
Masaaki Adachi, Kanazawa Univ. (Japan)
Katsuyuki Inabe, Kanazawa Univ. (Japan)

Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)

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