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Proceedings Paper

Quantitative phase measurement interference microscope for transparent objects
Author(s): Jun Chen; Junji Endo; Hiroyuki Fujita
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Paper Abstract

We present a new interference microscope for quantitative measurement of transparent objects. High precision measurement is achieved by applying the phase-shifting interferometry to an ordinary transmission optical microscope. In that microscope, a bi-prism inserted between a magnifying lens and an observation plane is used as both a beam splitter and a phase shifter. The phase shift required for phase extraction using the phase-shifting technique is introduced by laterally shifting the bi-prism with a piezoelectric transducer. The diffraction caused by the vertex of the bi-prism is avoided by placing a thin wire at the center position of an intermediate image plane. Experimental results for measuring the refractive index distribution of an optical waveguide and the thickness of a biological sample are presented to demonstrate the usefulness of the this method.

Paper Details

Date Published: 20 September 2002
PDF: 7 pages
Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.465754
Show Author Affiliations
Jun Chen, Tokyo Institute of Polytechnics and CREST/Japan Science and Technology Corp. (Japan)
Junji Endo, Hitachi Ltd. and CREST/Japan Science and Technology Corp. (Japan)
Hiroyuki Fujita, Univ. of Tokyo and CREST/Japan Science and Technology Corp. (Japan)

Published in SPIE Proceedings Vol. 4919:
Advanced Materials and Devices for Sensing and Imaging
Jianquan Yao; Yukihiro Ishii, Editor(s)

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