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Proceedings Paper

Large-area deposition of a polycrystalline CdZnTe film and its applicability to x-ray panel detectors with superior sensitivity
Author(s): Satoshi Tokuda; Hiroyoki Kishihara; Susumu Adachi; Toshiyuki Sato; Yoshihiro Izumi; Osamu Teranuma; Yasukuni Yamane; Satoshi Yamada
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Paper Abstract

This paper describes our investigation of the X-ray detective characteristics of a thick polycrystalline CdZnTe film deposited on a large-area substrate. We deposited a polycrystalline CdZnTe film on a 9 inch by 9 inch substrate, and investigated its quality. It was verified to be quite uniform within the substrate. We also cut the film and connected it to a 3 inch by 3 inch TFT panel for evaluating the X-ray imaging performance. The TFT array format was 512 by 512 pixels with a pixel pitch of 150 micrometers . The thickness of the CdZnTe film was about 300 micrometers after lapping and polishing, and the film density per unit area was higher than 170 mg/cm2. The average sensitivity was 1.5E9 e-/mR/mm2; the beam condition was 80 kV with 26-mm Al filtration. The MTF measured at 1 lp/mm was 0.82. The time response and uniformity of X-ray sensitivity were not still adequate, and further improvements are in progress. In conclusion, we have demonstrated the applicability of the polycrystalline CdZnTe film to a large-area detector, although further investigations and improvements are needed.

Paper Details

Date Published: 3 May 2002
PDF: 12 pages
Proc. SPIE 4682, Medical Imaging 2002: Physics of Medical Imaging, (3 May 2002); doi: 10.1117/12.465579
Show Author Affiliations
Satoshi Tokuda, Shimadzu Corp. (Japan)
Hiroyoki Kishihara, Shimadzu Corp. (Japan)
Susumu Adachi, Shimadzu Corp. (Japan)
Toshiyuki Sato, Shimadzu Corp. (Japan)
Yoshihiro Izumi, Sharp Corp. (Japan)
Osamu Teranuma, Sharp Corp. (Japan)
Yasukuni Yamane, Sharp Corp. (Japan)
Satoshi Yamada, Shimadzu Corp. (Japan)

Published in SPIE Proceedings Vol. 4682:
Medical Imaging 2002: Physics of Medical Imaging
Larry E. Antonuk; Martin Joel Yaffe, Editor(s)

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