Proceedings Paper
Notes from the NIST/NRL/SPIE workshop on nanostructure science, metrology, and technology: microelectronics group| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
We believe that the answer is yes. However, given the incredible diversity and richness of the nanoscale world, we felt that it was necessary to devise a working definition in the context of microelectronics.
Paper Details
Date Published: 24 July 2002
PDF: 4 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465494
Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology
Martin C. Peckerar; Michael T. Postek Jr., Editor(s)
PDF: 4 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465494
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Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology
Martin C. Peckerar; Michael T. Postek Jr., Editor(s)
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