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Proceedings Paper

New design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings
Author(s): Satoshi Gonda; Hui Zhou; Joseph Fu; Richard M. Silver
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Paper Abstract

A basic scheme of direct, highly accurate dimensional measurements of nanostructures is presented. We have constructed a scanning tunneling microscope (STM) unit combined with a diode laser-based Michelson interferometer module. The compact size of the STM allows it to be installed in an ultra high vacuum (UHV) chamber and is capable of measuring atomic spacings on a reconstructed single crystal surface. This method aims at direct dimensional calibration of microelectronic structures such as linewidths and line/space features. The calibrated dimensions of these features will be traceable to the international unit of length through the He-Ne laser wavelength and be a reliable standard for next generation nanostructures and nanofabrication.

Paper Details

Date Published: 24 July 2002
PDF: 7 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465125
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Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology
Martin C. Peckerar; Michael T. Postek Jr., Editor(s)

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