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Proceedings Paper

Surface roughness measurement using infrared phase-shifting digital interferometer
Author(s): Yong He; Lei Chen; Qing Wang; Jingbang Chen
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Paper Abstract

The design of far infrared phase-shifting Twyman-Green interferometer is described in this paper. An IR interferometric method is used to evaluate the surface roughness of ground glass. It is conducted that a rigorous mathematical analysis to describe the contrast of the interference fringes patterns and surface roughness. The experiment is run at the instrument of self-developed interferometer which aperture is Φ 30mm with accuracy better than λ/50 (λ=10.6μm). The mathematical derivation is verified with experimental data obtained from various values of roughness.

Paper Details

Date Published: 20 September 2002
PDF: 7 pages
Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.464060
Show Author Affiliations
Yong He, Nanjing Univ. of Science and Technology (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)
Qing Wang, Nanjing Univ. of Science and Technology (China)
Jingbang Chen, Nanjing Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 4927:
Optical Design and Testing
Zhicheng Weng; Jose M. Sasian; Yongtian Wang, Editor(s)

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