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Proceedings Paper

Acid-catalyzed pinacol rearrangement: chemically amplified reverse polarity change
Author(s): Ratnam Sooriyakumaran; Hiroshi Ito; Eugene A. Mash
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Paper Abstract

The reverse polarity change from a polar to a nonpolar state has been successfully incorporated in the design of chemical amplification resists. The imaging mechanism is based on the pinacol-pinacolone rearrangement, wherein vic-diols (pinacols) are converted to ketones or aldehydes with photochemically generated acid as a catalyst. In addition to a polymeric pinacol which undergoes the rearrangement very cleanly in the solid state, aqueous base developable three-component negative deep UV resist systems are described, which are based on phenolic resins, small pinacols, and triphenylsulfonium hexafluoroantimonate as the acid generator.

Paper Details

Date Published: 1 June 1991
PDF: 10 pages
Proc. SPIE 1466, Advances in Resist Technology and Processing VIII, (1 June 1991); doi: 10.1117/12.46390
Show Author Affiliations
Ratnam Sooriyakumaran, IBM/East Fishkill Facility (United States)
Hiroshi Ito, IBM/Almaden Research Ctr. (United States)
Eugene A. Mash, IBM/Almaden Research Ctr. (United States)

Published in SPIE Proceedings Vol. 1466:
Advances in Resist Technology and Processing VIII
Hiroshi Ito, Editor(s)

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