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Proceedings Paper

Production of polymer diffractive optical elements by contact printing
Author(s): Richard J. Winfield; Martin Meister; Shane O'Brien; Brendan McCarthy
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Paper Abstract

We present the fabrication of phase only diffractive optical elements (DOEs) by contact prints using a novel technique. Phase only DOEs consist of a transparent slide with a surface profile that modulates the phase of an incident laser beam in the desired manner. This surface profile can be exploited to split or to shape the laser beam. In our process a Perspex sheet (PMMA) is exposed through a chrome-on-quartz mask that carries the DOE pattern. The UV light used in the exposure is generated by an ArF excimer laser (l=193nm). The high energy radiation causes photomodification and the phase pattern of the DOE is transferred to the PMMA. While the primary investigations concentrate on binary DOEs, which require one exposure only, we have also attempted to produce multilevel designs which need mask alignment and tighter control of the exposure. At the moment, we study the capability of the method to produce relatively large structures but it might also be possible to use it to manufacture finer structures.

Paper Details

Date Published: 27 August 2003
PDF: 8 pages
Proc. SPIE 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications, (27 August 2003); doi: 10.1117/12.463714
Show Author Affiliations
Richard J. Winfield, National Microelectronics Research Ctr. (Ireland)
Martin Meister, National Microelectronics Research Ctr. (Ireland)
Shane O'Brien, National Microelectronics Research Ctr. (Ireland)
Brendan McCarthy, National Microelectronics Research Ctr. (Ireland)

Published in SPIE Proceedings Vol. 4876:
Opto-Ireland 2002: Optics and Photonics Technologies and Applications
Vincent Toal; Norman Douglas McMillan; Gerard M. O'Connor; Eon O'Mongain; Austin F. Duke; John F. Donegan; James A. McLaughlin; Brian D. MacCraith; Werner J. Blau, Editor(s)

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