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Proceedings Paper

Design and experiment of silicon PCR chips
Author(s): Zheng Cui; Zhan Zhao; Shanhong Xia
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Paper Abstract

There are considerable interests in integrating Polymerase chain reaction (PCR) on a microchip can have much fast heating and cooling rate, the delicacy in its structure makes the PCR experiment difficult and cracks often occur particularly for the thin membrane type of PCR chips. Design study and experiment of silicon PCR chips are presented with the aim of identifying the problems encountered in experiment and finding an optimum chip structure. Heating characteristics of four different heater designs have been compared, so have the PCR chambers with fixed frame and with suspended frame. The thermal stress analysis has shown that the structure and heater design can make a significant difference in heating characteristics and in reducing the failure of PCR chips. Different solutions to reduce PCR chip failure have been proposed. One of the solutions was implemented in the experiment, confirming the design study results. Silicon PCR chips have been fabricated. Thermal cycling and initial DNA amplification results are presented.

Paper Details

Date Published: 19 April 2002
PDF: 6 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462884
Show Author Affiliations
Zheng Cui, Rutherford Appleton Lab. (United Kingdom)
Zhan Zhao, Institute of Electronics (China)
Shanhong Xia, Institute of Electronics (China)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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