Share Email Print

Proceedings Paper

Surface tension defects in microfluidic self-alignment
Author(s): Jan Lienemann; Andreas Greiner; Jan G. Korvink
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Self-alignment in the fluidic phase is an alternative technique to conventional pick-and-place assembly, providing cost-effective, precise assembly of millions of microparts. For accurate alignment, the control of unwanted surface defects lowering alignment precision. Local minima are investigated and the modulation of the energy curve is simulated. Furthermore, hytsteresis effects are studied. The simulation results allow predictions for the modeling of the fluidic surface tension driven self alignment and thus provide conditions for the robustness of the fabrication process.

Paper Details

Date Published: 19 April 2002
PDF: 9 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462862
Show Author Affiliations
Jan Lienemann, Univ. Freiburg (Germany)
Andreas Greiner, Univ. Freiburg (Germany)
Jan G. Korvink, Univ. Freiburg (Germany)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?