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Proceedings Paper

Characteristics of a torsional resonator with two degrees of freedom fabricated by UV-LIGA
Author(s): Takashi Usuda; Skandar Basrour; H. Majjad; Jean-Rene Coudevylle; Michel de Labachelerie
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Paper Abstract

One of the authors has proposed an electrostatically driven torsional resonator with two degrees of freedom (TDF). The main characteristic of the TDF resonator, in which the electrode gap does not directly affect to inconsistencies between low voltage driving and a large range of motion, is reported. The TDF structure is also beneficial for achieving high Q values. However, size reduction was difficult because of the limitations of the fabrication process. In this study, the TDF resonator is miniaturized by the UV-LIGA (UV exposed lithography and electroplated structure) process. The process and the frequency characteristics of the resonator are reported.

Paper Details

Date Published: 19 April 2002
PDF: 7 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462860
Show Author Affiliations
Takashi Usuda, National Metrology Institute of Japan (Japan)
Skandar Basrour, TIMA Lab. (France)
H. Majjad, LPMO-CNRS (France)
Jean-Rene Coudevylle, LPMO-CNRS (France)
Michel de Labachelerie, LPMO-CNRS (France)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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