The Transmission Line Matrix method (TLM) provides an easy to use and fast scheme to calculate acoustic fields. Thus it is possible to couple this method to system simulation tools in order to investigate the behavior of acoustic systems and the interaction between acoustic domain and control electronics at an early design stage. These investigations are very important in MEMS design, especially for ultrasonic devices, transducers and SAW filters. As a proof of concept an active noise control system was designed and the performance was simulated in a 2D acoustic environment. The results clearly show the feasibility of acoustic field calculations along with system level simulations of electronic devices and transducers. Using this scheme, acoustic devices may be simulated and optimized under realistic acoustic conditions.

Date Published: 19 April 2002
PDF: 8 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462830

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)