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Proceedings Paper

Design of electrostatic actuators for MOEMS applications
Author(s): Dooyoung Hah; Hiroshi Toshiyoshi; Ming C. Wu
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Paper Abstract

We propose a novel method for pull-in analysis in electrostatic actuation. In this method, pull-in angle can be found once the capacitance of electrodes is calculated as function of rotation angle. This is based on our theory, which is that the pull-in angle only depends on the capacitance but not on spring constants or applied voltage. The theory is derived analytically and its limit of application is described as well. This theory and method can be applied to the translational motion case in the similar fashion. With the proposed method, the computation time can be reduced considerably since it deals with only one domain rather than executing coupled-domain analysis. This method can be used more effectively where the complexity of electrode structures or spring shape is more severe. By way of example, it is applied to the design of three different types of actuators: parallel-plate torsion mirrors, staggered vertical comb-drives, and scanning micromirror with hidden vertical comb-drives. The theoretical results are compared with experimental data as well.

Paper Details

Date Published: 19 April 2002
PDF: 8 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462812
Show Author Affiliations
Dooyoung Hah, Univ. of California/Los Angeles and Electronics and Telecommunications Research Institute (United States)
Hiroshi Toshiyoshi, Univ. of California/Los Angeles and Univ. of Tokyo (Japan)
Ming C. Wu, Univ. of California/Los Angeles (United States)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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