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Proceedings Paper

Application of XML to geometric modeling of MEMS
Author(s): Jiunn-Horng Lee; Hung-Chun Wu; Wei-Te Lee; Chih-Wei Cheng
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Paper Abstract

The necessary information for geometric modeling of MEMS consists of a mask layout file and a process definition file. CIF and GDSII are commonly accepted formats for the mask layout file. However, there are no standard ways to express the process definition file. In this paper, we propose an XML (Extensible Markup Language) data model to describe the process definition file for geometric modeling of surface-micro-machined MEMS. This model has been incorporated in our CAD system. The results of implementation show that the XML approach not only facilitates the development of applications but also helps the exchange of information.

Paper Details

Date Published: 19 April 2002
PDF: 8 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462810
Show Author Affiliations
Jiunn-Horng Lee, National Ctr. for High-Performance Computing (Taiwan)
Hung-Chun Wu, National Central Univ. (Taiwan)
Wei-Te Lee, National Chiao Tung Univ. (Taiwan)
Chih-Wei Cheng, National Ctr. for High-Performance Computing (Taiwan)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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