We demonstrate that three-dimensional multiphonon microfabrication using photopolymerization can be accomplished using a small fraction of the output of a mode- locked Ti:sapphire laser by employing an appropriate commercially-available photoinitiator. Using this photoinitiator we have been able to develop resins with a broad range of physical and chemical characteristics for use in microfabrication. The combination of optical and chemical nonlinearity in the photopolymerization reaction allows us to make structures readily with submicron features. The use of a variable beam expander allows us to create features with a broad range of sizes using a single objective while avoiding out-of-focus polymerization.

Date Published: 1 April 2002
PDF: 9 pages
Proc. SPIE 4633, Commercial and Biomedical Applications of Ultrafast and Free-Electron Lasers, (1 April 2002); doi: 10.1117/12.461373

Published in SPIE Proceedings Vol. 4633:
Commercial and Biomedical Applications of Ultrafast and Free-Electron Lasers
Joseph Neev; Glenn S. Edwards; Joseph Neev; Andreas Ostendorf; Andreas Ostendorf; John Clark Sutherland, Editor(s)