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Proceedings Paper

Micromachined scanning mirrors for laser beam deflection
Author(s): Peter Huber; U. Gerlach-Meyer
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Paper Abstract

The monolithic, micromachined devices presently discussed can be used in future satellite payloads to achieve low mass, low volume, and low power consumption requirements associated with pointing-acquisition-tracking purposes in optical free-space communications systems. Such performance parameters as resonance frequency and deflection characteristics can be adjusted through simple variation of the lithographic masks and their processing parameters. The technical feasibility of such monolithic scanners has been demonstrated.

Paper Details

Date Published: 1 May 1991
PDF: 7 pages
Proc. SPIE 1522, Optical Space Communication II, (1 May 1991); doi: 10.1117/12.46089
Show Author Affiliations
Peter Huber, Battelle-Institut e.V. (Germany)
U. Gerlach-Meyer, Battelle-Institut e.V. (Germany)

Published in SPIE Proceedings Vol. 1522:
Optical Space Communication II
Juergen Franz, Editor(s)

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