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Proceedings Paper

Enhancement of multilayer-coated normal incidence gratings in the extreme ultraviolet using a CN_x smoothing layer
Author(s): Robert A. Stern; Lawrence Shing; Yip-Wah Chung; Murat U. Guruz
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Paper Abstract

We describe a novel process to improve the extreme ultraviolet (EUV) reflection efficiency of multilayer-coated replica gratings through an intermediate CNX overcoat. Au-coated and uncoated (SiO2 surface) Hitachi replica gratings (20 x 20 mm, 4800 g/mm, 13° blaze angle), designed to provide peak efficiencies at 304 Å in 3rd order, were measured using an AFM prior to and after the CN$X coating. The CNX coating produced substantially smoother grating facets without significantly degrading the grating groove profile. The gratings were then overcoated with a 10 layer Mo/Si stack optimized for near normal reflectivity at 304 Å. Reflectivity measurements in 3rd order demonstrated an enhancement in absolute grating efficiency by a factor of 4 over the Mo/Si + Au-coated grating. The results of this simple experiment suggest that, with further improvements, the CNX overcoating process may provide a useful and relatively inexpensive alternative to the use of ion-etched blazed gratings in the EUV for some applications.

Paper Details

Date Published: 24 February 2003
PDF: 11 pages
Proc. SPIE 4854, Future EUV/UV and Visible Space Astrophysics Missions and Instrumentation, (24 February 2003);
Show Author Affiliations
Robert A. Stern, Lockheed Martin Advanced Technology Ctr. (United States)
Lawrence Shing, Lockheed Martin Advanced Technology Ctr. (United States)
Yip-Wah Chung, Northwestern Univ. (United States)
Murat U. Guruz, IBM Storage Technology Div. (United States)

Published in SPIE Proceedings Vol. 4854:
Future EUV/UV and Visible Space Astrophysics Missions and Instrumentation
J. Chris Blades; Oswald H. W. Siegmund, Editor(s)

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