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Proceedings Paper

Highly versatile tapeout automation system
Author(s): Richard D. Morse
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Paper Abstract

Developing a tapeout automation system that works in a static environment where inputs and outputs can be defined - as in a vertically integrated Semiconductor Company - is relatively straightforward. In an environment with a large variety of inputs and outputs, a more versatile system must be developed. The key elements of such a system must be flexibility and ease of maintenance. In order to accomplish this, D2W has developed a software-independent suite of tools which employs a highly modular approach and dynamic variable substitution to enable everything from multi-processing to customer-specific documentation. This system routinely manages tapeout flows with several thousand variables in a highly accurate, high speed, fully automated mode. These tools have been developed and refined over a period of 10 years and deployed for tapeouts to more than 40 companies, implementing in excess of 100 technologies, and successfully interfacing with 14 or more commercial and captive mask shops worldwide

Paper Details

Date Published: 11 March 2002
PDF: 7 pages
Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); doi: 10.1117/12.458293
Show Author Affiliations
Richard D. Morse, D2W (United States)

Published in SPIE Proceedings Vol. 4562:
21st Annual BACUS Symposium on Photomask Technology
Giang T. Dao; Brian J. Grenon, Editor(s)

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