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Proceedings Paper

Fabrication of micropumps with Q-switched Nd:YAG-lasers
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Paper Abstract

Microfluidics has become one of the most intense research fields in MEMS technology. In this paper, the use of a 1064nm Q-switched solid state laser to fabricate micro-pump cavities in copper is presented. The focusing technique is employed fore directly structuring the micro-pumps and mixers. In this case, a laser beam with a focal spot of 50 micrometers is canned over the surface and the substrate material is ablated track by track and layer by layer. Machining results such as surface finishing and dimensional resolution are discussed. The dependence of the ablation depth, ablation rate and surface roughness on the process parameters and on the scan overlap are investigated. The laser micromachined structures are free of cracks and without any deposition of debris on the surface. The assembly and first characterization results of the pumps are reviewed. The capability as well as the potential of laser micromachining are also discussed.

Paper Details

Date Published: 25 February 2002
PDF: 8 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456871
Show Author Affiliations
Tuan-Anh Mai, Gintic Institute of Manufacturing Technology (Singapore)
Nam-Trung Nguyen, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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