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Proceedings Paper

Optical and surface properties of ZnO thin films by PLD
Author(s): Yongfeng Lu; H. Q. Ni; ZhongMin Ren
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Paper Abstract

ZnO films have been grown on silicon (100) and sapphire (0001) substrates by pulsed laser deposition (PLD). The influences of substrate temperature and laser fluence on the properties of the films were studied. The effects of annealing on the ZnO films were investigated by X-ray photoelectron spectroscopy (XPS). The surface properties of ZnO were studied by scanning tunneling spectroscopy (STS). The band edge emission properties of the ZnO films have been studied by the photoluminescence spectroscopy (PL).

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456835
Show Author Affiliations
Yongfeng Lu, National Univ. of Singapore (United States)
H. Q. Ni, National Univ. of Singapore (Singapore)
ZhongMin Ren, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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