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Proceedings Paper

Liquid-assisted pulsed laser cleaning with near-infrared and ultraviolet pulsed lasers
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Paper Abstract

Liquid-assisted steam nanosecond pulsed laser irradiation is shown to be effective for cleaning contaminant particles as small as 0.3 micrometers in diameter from metallic substrates. The cleaning threshold and efficiency are investigated for the fundamental and frequency-tripled Nd:YAG laser harmonics (wavelengths (lambda) equals1064 and 355 nm). The rapid phase- change and thin liquid film ablation processes are examined in order to elucidate the cleaning mechanism. The pressure enhancement accompanying the explosive-vaporization process and the momentum supplied by the ablation plume are the main sources of the augmented cleaning efficiency at moderate laser energy densities.

Paper Details

Date Published: 25 February 2002
PDF: 7 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456822
Show Author Affiliations
Constantine P. Grigoropoulos, Univ. of California/Berkeley (United States)
Dongsik Kim, Univ. of California/Berkeley (South Korea)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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