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Proceedings Paper

Design and simulation of microelectromechanical transducer using uncoupled finite element models
Author(s): Ilya Valerievich Avdeev; Michael R. Lovell; Dipo Onipede Jr.
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Paper Abstract

Due to the increased complexity demands and precision requirements of microelectromechanical systems (MEMS), there is a need for reliable and accurate simulation methods to model physical behavior involved. In particular, the design of improved MEMS transducers can be facilitated by simulating the interaction between the electrostatic and structural domains associated with these devices. In this work, several computational mechanics issues involving electrostatic and structural coupling for MEMS are presented and discussed, including the trade-off between cost and accuracy. Several uncoupled finite element (FE) models are presented and simulated to optimize the design and fabrication of a combdrive based electrostatic microactuator. The benefits and limitations of these uncoupled FE models are then discussed. The asymmetric structural response of the combdrive actuator is further analyzed and a simplified closed-form analytical model is presented for a basis of comparison for the FE results. Based on differences between FE and analytically calculated values, the contribution of fringing electrostatic fields to the mechanical forces produced in the combdrive are discussed.

Paper Details

Date Published: 18 February 2002
PDF: 9 pages
Proc. SPIE 4627, Fifth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (18 February 2002); doi: 10.1117/12.456275
Show Author Affiliations
Ilya Valerievich Avdeev, Univ. of Pittsburgh (United States)
Michael R. Lovell, Univ. of Pittsburgh (United States)
Dipo Onipede Jr., Univ. of Pittsburgh (United States)

Published in SPIE Proceedings Vol. 4627:
Fifth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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