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Proceedings Paper

Evolution of surface characteristics in material removal simulation with subaperture tools
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Paper Abstract

Over the last decade, we have witnessed that the fabrication of 200 - 2000 mm scale have received relatively little attention from the fabrication technology development, compared to those of smaller than 200 mm and of larger than 2000 mm in diameter. As a result, the optical surfaces of these scales are still predominantly completed by small optics shops where opticians apply the traditional technique for polishing. Lack of tools in aiding opticians for planning, executing and analyzing their polishing work is a root cause for long and, sometimes, unpredictable delivery and high manufacturing cost for such optical surfaces. We present the on-going development of a software simulation environment called Surface Analysis and Fabrication Environment (SAFE). It is primarily intended to increase the throughput of polishing and testing cycles by allowing opticians to simulate the resulting surface form and roughness with input polishing variables. A brief review of current polishing techniques and their target optics clarifies the need for such simulation tool. This is followed by the development targets and a preliminary simulation plan using the developmental version of SAFE. Among many polishing variables, two removal assumptions and three different types of removal functions we used for the polishing simulation presented. The simulations show that the Gaussian removal function with the proportional removal assumption resulted in the fastest, though marginal, convergence to a super-polished surface of 0.56 micron Peat- to-Valley in form accuracy and of 0.02 nanometer in surface roughness Ra. Other meaningful results and their implications are also presented.

Paper Details

Date Published: 5 February 2002
PDF: 8 pages
Proc. SPIE 4411, Large Lenses and Prisms, (5 February 2002); doi: 10.1117/12.454878
Show Author Affiliations
Sug-Whan Kim, Yonsei Univ. and California Institute of Technology (United States)
Myung-Kook Jee, Yonsei Univ. and California Institute of Technology (United States)

Published in SPIE Proceedings Vol. 4411:
Large Lenses and Prisms
Richard G. Bingham; David D. Walker, Editor(s)

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