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Proceedings Paper

Micro-electromechanical spatial light modulators with integrated electronics
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Paper Abstract

This paper describes design and development of a microelectromechanical, micromachined spatial light modulator ((mu) SLM) integrated with complementary metal- oxide semiconductor (CMOS) electronics, for control of optical phase in phase-only optical correlators. The (mu) SLM will consist of a large array of piston-motion MEMS mirror segments (pixels) each of which capable of altering the phase of reflected light by up to one wavelength for infrared (1.5 micrometers ) illumination. Results of a proof-of- concept study are presented along with an electromechanical model and details of the fabrication process for the (mu) SLM.

Paper Details

Date Published: 1 February 2002
PDF: 7 pages
Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); doi: 10.1117/12.454712
Show Author Affiliations
Steven Cornelissen, Boston Univ. (United States)
Thomas G. Bifano, Boston Univ. (United States)
Paul A. Bierden, Boston Micromachines Corp. (United States)

Published in SPIE Proceedings Vol. 4493:
High-Resolution Wavefront Control: Methods, Devices, and Applications III
John D. Gonglewski; Mikhail A. Vorontsov; Mark T. Gruneisen, Editor(s)

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