This paper describes design and development of a microelectromechanical, micromachined spatial light modulator ((mu) SLM) integrated with complementary metal- oxide semiconductor (CMOS) electronics, for control of optical phase in phase-only optical correlators. The (mu) SLM will consist of a large array of piston-motion MEMS mirror segments (pixels) each of which capable of altering the phase of reflected light by up to one wavelength for infrared (1.5 micrometers ) illumination. Results of a proof-of- concept study are presented along with an electromechanical model and details of the fabrication process for the (mu) SLM.

Date Published: 1 February 2002
PDF: 7 pages
Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); doi: 10.1117/12.454712

Published in SPIE Proceedings Vol. 4493:
High-Resolution Wavefront Control: Methods, Devices, and Applications III
John D. Gonglewski; Mikhail A. Vorontsov; Mark T. Gruneisen, Editor(s)