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Proceedings Paper

Electrical and optical properties of thin films prepared by spin coating a dispersion of nano-sized tin-doped indium-oxide particles
Author(s): Jesper Ederth; Annette Hultaker; Peter Heszler; Gunnar A. Niklasson; Claes-Goeran Granqvist; Arie K. Jansen van Doorn; Chris van Haag; Michel J. Jongerius; Detlef Burgard
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Paper Abstract

Thin films were made by spinning a dispersion of tin-doped indium-oxide particles, having an average diameter of 14 nm, onto glass substrates. As-deposited thin films displayed a resistivity (rho) of 0.3 (Omega) m and some optical absorption. Annealing in vacuum at 200 to 400 degree(s)C for 2 h, and subsequently in air at 500 degree(s)C for 2 h, produced films with (rho) equals10--3 (Omega) m and a visible transmittance exceeding 90 %. Leaving out the vacuum treatment yielded higher resistivity.

Paper Details

Date Published: 19 November 2001
PDF: 6 pages
Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); doi: 10.1117/12.454615
Show Author Affiliations
Jesper Ederth, Uppsala Univ. (Sweden)
Annette Hultaker, Uppsala Univ. (Sweden)
Peter Heszler, Uppsala Univ. (Sweden)
Gunnar A. Niklasson, Uppsala Univ. (Sweden)
Claes-Goeran Granqvist, Uppsala Univ. (Sweden)
Arie K. Jansen van Doorn, Philips Research Labs. (Netherlands)
Chris van Haag, Philips Research Labs. (Netherlands)
Michel J. Jongerius, Philips Research Labs. (Netherlands)
Detlef Burgard, Nanogate GmbH (Germany)

Published in SPIE Proceedings Vol. 4590:
BioMEMS and Smart Nanostructures
Laszlo B. Kish; Erol C. Harvey; William B. Spillman Jr., Editor(s)

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