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Proceedings Paper

Cantilever-type PZT microsensor using resonance frequency for bioMEMS application
Author(s): Kyung-II Hong; Seung-Beom Kim; Sang-Jin Kim; Duck-Kyun Choi
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Paper Abstract

Among various materials for microelectromechanical systems (MEMS) devices, piezoelectric thin films have attracted considerable attention since they are one of the essential materials in microfabricated devices such as microsensors and microactuators. In this study, we propose a new and simple cantilever type Pb(Zr,Ti)O3 [PZT] microsensor using RuO2 which could detect the resonance frequency varation. Since RuO2 has good electrical conductivity and stiffness, it can replace the double layer of electrode and supporting layer to a single layer in a cantilever beam. Also, Si substrate was isotropically etched from the surface using SF6 plasma. These unique technique simplifies the structure and process of a cantilever. The cantilever consists of Al, PZT and RuO2 layers. To find relationships between resonance frequency and shape of cantilever, microsensors with various widths and lengths were fabricated and their resonance frequencies were measured by laser doppler vabrometer (LDV) system. In addition, detection sensitivity of microsensor was investigated. The resonance frequency decreased as the length of cantilever increased.

Paper Details

Date Published: 19 November 2001
PDF: 8 pages
Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); doi: 10.1117/12.454611
Show Author Affiliations
Kyung-II Hong, Hanyang Univ. (South Korea)
Seung-Beom Kim, Hanyang Univ. (South Korea)
Sang-Jin Kim, Hanyang Univ. (South Korea)
Duck-Kyun Choi, Hanyang Univ. (South Korea)

Published in SPIE Proceedings Vol. 4590:
BioMEMS and Smart Nanostructures
Laszlo B. Kish; Erol C. Harvey; William B. Spillman Jr., Editor(s)

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