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Proceedings Paper

Fabrication of multiple-pitch waveguide gratings by using a single CGH phase mask
Author(s): Hyong Sik Won; Seok Ho Song; Pill Soo Kim; YooYong Lee
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Paper Abstract

Monolithic fabrication of submicrometer multiple-pitch gratings by use of a single computer-generated phase mask(CGPM) is proposed. The CGPM is a computer-generated Fourier hologram generating multiple diffracted beams with equal intensity from a single incident beam. The submicrometer grating periods differing by as little as a few angstroms are estimated with basis of multiple diffraction angles and it is compared with experimental results.

Paper Details

Date Published: 25 November 2002
PDF: 6 pages
Proc. SPIE 4805, Design and Fabrication of Planar Optical Waveguide Devices and Materials, (25 November 2002); doi: 10.1117/12.453920
Show Author Affiliations
Hyong Sik Won, Hanyang Univ. (South Korea)
Seok Ho Song, Hanyang Univ. (South Korea)
Pill Soo Kim, Hanyang Univ. (South Korea)
YooYong Lee, Samsung Electronics Co., Ltd. (South Korea)

Published in SPIE Proceedings Vol. 4805:
Design and Fabrication of Planar Optical Waveguide Devices and Materials
Robert A. Norwood, Editor(s)

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