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Proceedings Paper

Surface and interface roughness in magnetic thin films: a comparison using carbon-nanotube atomic force microscopy and soft-x-ray scattering
Author(s): Bryan M. Barnes; F. Flack; John J. Kelly IV; Doug P. Lagally; Don E. Savage; Max G. Lagally
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Paper Abstract

Characterization of surface and interfacial morphology of magnetic materials is crucial to understand their properties. While AFM is unparalleled in directly determining surface morphology, x-ray scattering has distinct advantages for measuring both the surface and buried interfaces. However, x-ray scattering (XRS) requires modeling to extract roughness parameters. We review the techniques for performing and modeling XRS and show that the azimuthal transverse scattering geometry offers many advantages to in-plane scattering techniques, including a simplified modeling process and an extended scanning range in reciprocal space. To validate our modeling, the surface morphology of several magnetic thin films (d < 10 nm) is characterized using soft-x-ray scattering and carbon-nanotube tip atomic force microscopy (CNT-AFM). Results for out-of-plane XRS and CNT-AFM are within good quantitative agreement within their shared experimental bandpass.

Paper Details

Date Published: 22 October 2002
PDF: 11 pages
Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); doi: 10.1117/12.453790
Show Author Affiliations
Bryan M. Barnes, Univ. of Wisconsin/Madison (United States)
F. Flack, Univ. of Wisconsin/Madison (United States)
John J. Kelly IV, Univ. of Wisconsin/Madison (United States)
Doug P. Lagally, Univ. of Wisconsin/Madison (United States)
Don E. Savage, Univ. of Wisconsin/Madison (United States)
Max G. Lagally, Univ. of Wisconsin/Madison (United States)

Published in SPIE Proceedings Vol. 4780:
Surface Scattering and Diffraction for Advanced Metrology II
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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