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Proceedings Paper

Measurement of the dynamic deformation of a high-frequency scanning mirror using a Shack-Hartmann wavefront sensor
Author(s): Margaret K. Brown; Timothy J. Gong; Daniel R. Neal; James P. Roller; Selso Luanava; Hakan Urey
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Paper Abstract

Scanning mirrors for micro-display systems typically require operation at frequencies over 15 kHz. These mirrors undergo large dynamic stresses and inertia related deformations. We report here on the measurement of these dynamic deformations using a commercially available Shack-Hartmann wavefront sensor with data reduction software. The measured deformations using the Shack-Hartmann wavefront sensor are shown to agree with measurements obtained using a stroboscopic interferometer. Advantages of the Shack- Hartmann wavefront sensor are discussed.

Paper Details

Date Published: 27 December 2001
PDF: 9 pages
Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); doi: 10.1117/12.453645
Show Author Affiliations
Margaret K. Brown, Microvision, Inc. (United States)
Timothy J. Gong, Microvision, Inc. (United States)
Daniel R. Neal, WaveFront Sciences, Inc. (United States)
James P. Roller, WaveFront Sciences, Inc. (United States)
Selso Luanava, Microvision, Inc. (United States)
Hakan Urey, Microvision, Inc. (Turkey)

Published in SPIE Proceedings Vol. 4451:
Optical Manufacturing and Testing IV
H. Philip Stahl, Editor(s)

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